主要研究成果
近五年承担了国家自然基金、中物院院长基金、xx重大工程等项目10余项,发展了色散共焦位移测量、振动干扰补偿的相移干涉测量算法、双波长同步干涉原理与表面重构等技术,研制了线性色散物镜、抗振动干扰的平面激光干涉仪、粗糙度在位测量干涉显微镜、轮廓精密测量仪等测量功能部件与仪器。已发表SCI、EI论文30余篇,授权专利11项,出版译著《工程纳米测量基础》1部,。主要代表作有:
[1]刘乾,杨维川,袁道成, 王洋. 光谱共焦显微镜的线性色散物镜设计. 光学 精密工程. 2013, 21(10): 2473-2479.
[2]刘乾, 袁道成, 何华彬, 吉方. 白光干涉仪传递函数的成因分析及其非线性研究. 红外与激光工程. 2017, 46(6): 0634002.
[3]Q. Liu, D. Yuan, H. He. Enhancement of vibration desensitising capability of iterative algorithms for phase-shifting interferometers,Optics and Lasers in Engineering. 2017, 98: 31-36.
[4]Q. Liu, L. Li, H. Zhang, et al. Simultaneous dual-wavelength phase-shifting interferometry for surface topography measurement. Optics and Lasers in Engineering. 2020, 124: 105813.
[5]L. Li, Q. Liu*, H. Zhang, et al. 3D defect distribution detection by coaxial transmission dark-field. Optics and Lasers in Engineering. 2020, 127: 105988.
[6]Q. Liu, L. Li, X. Huang, et al. Hierarchical phase unwrapping for dual-wavelength digital holographic microscopy. Journal of Optics. 2020, 22: 045701.
[7]Q. Liu, H. Zhang, X. Huang, et al. Vibration-resistant interference microscope with assistant focusing for on-machine measurement of surface topography. Precision Engineering. 2020, 66: 220-228.
[8]李梦霞,曹博,卢佳玮,崔凯华,刘乾.数学形态学区域分割的快速相位解包裹算法. 光学精密工程. 2021,29(11): 2724-2433.
[9]J. Shi, Q. Liu, Y. Tan, K Cui, J. Lu. Fast and in-situ correction of camera channel crosstalk based on Fourier transform of carrier fringes in multi-colour interferometry. Optics and Lasers in Engineering. 2022, 151:106911.
[10]K. Cui, Q. Liu, X. Huang, H. Zhang, L. Li . Scanning error detection and compensation algorithm for white-light interferometry. Optics and Lasers in Engineering, 2022, 148: 106768.
[11]C. Hu, Q. Liu, H. Zhang, K. Cui. Two-dimensional differential null interferometry of transmission wavefront of axicon lens. Optics and Lasers in Engineering. 2022, 160: 107313.